Sputtering by particle bombardment - Behrisch, R. (Rainer).; Andersen, H. H. (Hans Henrik). (Berlin : Springer-Verlag, 1981)
Contents: 1. Physics and applications.
Includes index.
Bibliography: v.1, p.254-256.
Keywords: Sputtering (Physics).; Solids -- Effect of radiation on; Surfaces (Physics) -- Effect of radiation on