Sputtering by particle bombardment /
edited by R. Behrisch with contributions by H.H. Anderson ... [et al.].
- Berlin : Springer-Verlag, 1981.
- v. : ill. ; 23 cm.
- Topics in applied physics ; v. 47 .
Includes index. Bibliography: v.1, p.254-256.
Contents: 1. Physics and applications.
Sputtering (Physics). Solids--Effect of radiation on. Surfaces (Physics)--Effect of radiation on.