Sputtering by particle bombardment / edited by R. Behrisch with contributions by H.H. Anderson ... [et al.]. - Berlin : Springer-Verlag, 1981. - v. : ill. ; 23 cm. - Topics in applied physics ; v. 47 .

Includes index. Bibliography: v.1, p.254-256.

Contents: 1. Physics and applications.


Sputtering (Physics).
Solids--Effect of radiation on.
Surfaces (Physics)--Effect of radiation on.