Campbell, Stephen A.,  1954- <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell. 
 - New York :  Oxford University Press ,   1996. 
 - 536 p. : ill. ;   24 cm. 
<br/><br/>includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0195105087  RM181.50 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction