TY  - BOOK
AU  - Gibbons,James F
AU  - Johnson,William S.
AU  - Mylroie,Steven W.
TI  - Projected range statistics: semiconductors and related materials
SN  - 0470297395
PY  - 1975///
CY  - Hutchinson & Ross, Stroudsburg, Pa.
PB  - Dowden
KW  - Particle range (Nuclear physics)
KW  - Ion bombardment
KW  - Semiconductors
KW  - Ion implantation
N1  - Chiefly tables; Includes bibliographical references
ER  -