Proceedings of the symposium on electron, ion and laser beam technology : 21-23 May 1973 Massachusetts Institute of Technology Cambridge, Mass. /
special editor for the symposium, Edward D. Wolf
- New York : published for the American Vacuum Society by the American Institute of Physics, 1974
- p. xii, 909-1132, A32 : ill. ; 30 cm.
Reprint of the proceedings published in the Journal of Vacuum Science and Technology, vol. 10, no. 6, Nov./Dec. 1973.