TY  - BOOK
AU  - Ito,Hiroshi
AU  - Tagawa,Seiichi
AU  - Horie,Shigeo,1903-
TI  - Polymeric materials for microelectronic applications: science and technology 
T2  - ACS symposium series
SN  - 0841230552
PY  - 1994///
CY  - Washington, D.C.
PB  - American Chemical Society
KW  - Microelectronics
KW  - Materiaks
KW  - Congresses
KW  - Polymers
ER  -