Polymeric materials for microelectronic applications :  science and technology / 
editors: Hiroshi Ito, Seiichi Tagawa and Kazuyuki Horie 
 - Washington, D.C. :  American Chemical Society,  1994 
 - 468 p. :  ill. ;  23cm. 
 - ACS symposium series  579 .
<br/><br/><label>ISBN: </label>0841230552  RM289.19 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materiaks--Congresses.<br/>Polymers--Congresses.