TY  - BOOK
AU  - Brodie,Ivor
AU  - Muray,Julius J.
TI  - The physics of microfabrication
SN  - 0306408635
PY  - 1982///
CY  - New York
PB  - Plenum Press
KW  - Microelectronics
KW  - Thin
KW  - film circuits
N1  - Includes bibliographical references and index
ER  -