Brodie, Ivor <br/><br/>
The physics of microfabrication / 
Ivor Brodie and Julius J. Muray 
 - New York :  Plenum Press,  1982 
 - xix, 503 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0306408635 
<br/><br/><label>LCCN: </label>82-3835 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Thin--film circuits