TY  - BOOK
AU  - Casper,Lawrence A.
TI  - Microelectronics processing: inorganic materials characterization 
SN  - 0841209340
PY  - 1986///
CY  - Washington, D.C.
PB  - American Chemical Society
KW  - Microelectronics
KW  - Materials
KW  - Congresses
N1  - Developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society
ER  -