Microelectronics processing :  inorganic materials characterization / 
Lawrence A. Casper, editor. 
 - Washington, D.C. :  American Chemical Society ,  1986. 
 - 443 p. :  ill. ;  23 cm. 
<br/><br/> Developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. 
<br/><br/><label>ISBN: </label>0841209340 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials--Congresses.