TY  - BOOK
AU  - Hess,Dennis W.
AU  - Jensen,Klavs F.
TI  - Microelectronics processing: chemical engineering aspects 
SN  - 0841214751
PY  - 1989///
CY  - Washington, D.C.
PB  - American Chemical Society
KW  - Microelectronics
KW  - Materials
KW  - Integrated circuits
KW  - Design and construction
KW  - Surface chemistry
ER  -