Microelectronics processing :  chemical engineering aspects / 
Dennis W. Hess and Klaus F. Jensen ; editors. 
 - Washington, D.C. :  American Chemical Society ,  1989. 
 - 547 p. :  ill. ;  23 cm. 
 - Advances in chemistry series ;  v.221 .
<br/><br/><label>ISBN: </label>0841214751  RM133.49 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials.<br/>Integrated circuits--Design and construction.<br/>Surface chemistry.