TY  - BOOK
AU  - Ibbs,K.G.
AU  - Osgood,R.M.
TI  - Laser chemical processing for microelectronics
SN  - 0521322545
PY  - 1989///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Integrated circuits
KW  - Design and construction
KW  - Lasers
KW  - Industrial applications
ER  -