Laser chemical processing for microelectronics 
edited by K.G. Ibbs, R.M. Osgood 
 - Cambridge  Cambridge University Press  1989 
 - 172 p. : ill. ; 23 cm. 
 - Cambridge studies in modern optics  7 .
<br/><br/><label>ISBN: </label>0521322545 
<br/><br/><label>LCCN: </label>87-035864 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction<br/>Lasers--Industrial applications