Ion implantation techniques :  lectures given at the Ion Implantation School in connection with the Fourth International Conference on Ion Implantation : Equipment and Techniques, Bertchtesgaden, Feb. Rep. of Germany, September 13-15, 1982 / 
editors, H. Rysell and H. Glawischnig. 
 - Berlin :  Springer-Verlag,  1982 
 - 372 p.  ill. ;  23 cm. 
 - Springer series in electrophysics ;  10 .
 - Springer series in electrophysics ;  10 .
<br/><br/><label>ISBN: </label>3540118780 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion Implantation--Addresses, essays, lectures<br/>Semiconductor doping--Addresses, essays, lectures