TY  - BOOK
AU  - Townsend,P.D.
AU  - Kelly,J.C.
AU  - Hartley,N.E.W.
TI  - Ion implantation, sputtering and their applications
SN  - 0126969507
PY  - 1976///
CY  - London
PB  - Academic Press
KW  - Ion implantation
KW  - Sputtering (Physics)
N1  - includes bibliographical reference
ER  -