Townsend, P. D. <br/><br/>
Ion implantation, sputtering and their applications / 
by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. 
 - London :  Academic Press,  1976 
 - 333 p. :  ill. ;  24 cm. 
<br/><br/>includes bibliographical reference 
<br/><br/><label>ISBN: </label>0126969507 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation.<br/>Sputtering (Physics).