TY  - BOOK
AU  - Brice,David K.
AU  - Winterbon,K.Bruce
TI  - Ion implantation range and energy deposition distributions
SN  - 0306674017 (v.1)
PY  - 1975///
CY  - New York
PB  - Plenum Press
KW  - Ion implantation
N1  - Includes bibliographical references; v. 1; High incident ion energies -; v.2; Low incident ion energies
ER  -