Brice, David K.

Ion implantation range and energy deposition distributions / David K. Brice. - New York : Plenum Press, 1975 - 2 v. : ill. ; 28 cm.

Includes bibliographical references.

High incident ion energies - Low incident ion energies. v. 1 v.2

0306674017 (v.1) 0306674025 (v.2)


Ion implantation.