Brice, David K.
Ion implantation range and energy deposition distributions /
David K. Brice.
- New York : Plenum Press, 1975
- 2 v. : ill. ; 28 cm.
Includes bibliographical references.
High incident ion energies - Low incident ion energies. v. 1 v.2
0306674017 (v.1) 0306674025 (v.2)
Ion implantation.