Ion implantation in semiconductors and other materials / 
edited by Billy L. Crowder. 
 - New York :  Plenum Press,  1973 
 - xii, 657 p. :  ill. ;  26 cm. 
 - The IBM research symposia series. .
 - The IBM research symposia series. .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0306307561 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation--Congresses.<br/>Semiconductors--Congresses.