TY  - BOOK
AU  - Mayer,J.W.
AU  - Eriksson,Lennart
AU  - Davies,John Arthur
TI  - Ion implantation in semiconductors: silicon and germanium 
SN  - 0124808506
PY  - 1970///
CY  - New York
PB  - Academic Press
KW  - Ion implantation
KW  - Semiconductors
N1  - Includes bibliographical references
ER  -