TY  - BOOK
AU  - Agajanian,A.H.
TI  - Ion implantation in microelectronics: a comprehensive bibliography,
T2  - Computer science information guides
SN  - 030665198X
PY  - 1981///
CY  - New York
PB  - IFI/Plenum
KW  - Semiconductor doping
KW  - Bibliography
KW  - Ion implantation
ER  -