Ion implantation / 
by G. Dearnaley ... [et al.]. 
 - Amsterdam :  North-Holland Publishing Company,  1973 
 - xv, 802 p. :  ill. ;  23 cm. 
 - Defects in crystalline solids .  vol. 8 .
 - Defects in crystalline solids.  vol. 8 .
<br/><br/>Includes bibliographies. 
<br/><br/><label>ISBN: </label>0444104887 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation.