TY  - BOOK
AU  - Auciello,Orlando
AU  - Kelly,Roger
TI  - Ion bombardment modification of surfaces: fundamentals and applications 
T2  - Beam modification of materials
SN  - 0444423656
PY  - 1984///
CY  - Amsterdam
PB  - Elsevier North-Holland
KW  - Surfaces (Technology)
KW  - Ion bombardment
KW  - Ion implantation
KW  - Sputtering (Physics)
ER  -