Ion bombardment modification of surfaces : fundamentals and applications /
edited by Orlando Auciello and Roger Kelly.
- Amsterdam : Elsevier North-Holland, 1984
- 466 p. : ill. ; 25 cm.
- Beam modification of materials ; 1 .
- Beam modification of materials ; 1 .
0444423656
Surfaces (Technology). Ion bombardment. Ion implantation. Sputtering (Physics).