TY  - BOOK
AU  - Naka,Yuji
ED  - Kagaku Nogaku Kyokai (Japan).
TI  - Introduction to VLSI process engineering
SN  - 0412395509
PY  - 1993///
CY  - London
PB  - Chapman & Hall
KW  - Integrated circuits
KW  - Very larged scale integration
KW  - Design and construction
KW  - Manufacturing processes
N1  - 'The English language edition has been translated from the original Japanese publication: Introduction to VLSI processing for chemical engineers, Baifukan Co. Ltd., 1989'--T.p. verso; References : p. 201-204
ER  -