Introduction to VLSI process engineering - Naka, Yuji, 1945-; Kagaku Nogaku Kyokai (Japan). (London : Chapman & Hall, 1993)
'The English language edition has been translated from the original Japanese publication: Introduction to VLSI processing for chemical engineers, Baifukan Co. Ltd., 1989'--T.p. verso.
References : p. 201-204.
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Keywords: Integrated circuits -- Very larged scale integration -- Design and construction; Manufacturing processes