Introduction to VLSI process engineering / 
edited by the Society of Chemical Engineers of Japan ; editor in chief, Yuji Naka. 
 - London :  Chapman & Hall,  1993. 
 - 210 p. :  ill. ;  24 cm. 
<br/><br/> 'The English language edition has been translated from the original Japanese publication: Introduction to VLSI processing for chemical engineers, Baifukan Co. Ltd., 1989'--T.p. verso. 
<br/><br/>References : p. 201-204. 
<br/><br/><br/>engjpn 
<br/><br/><label>ISBN: </label>0412395509  RM157.25 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very larged scale integration--Design and construction.<br/>Manufacturing processes.