Impurity doping processes in silicon / 
edited by F.F.Y. Wang. 
 - Amsterdam :  North-Holland,  1981. 
 - 643 p. :  ill. ;  23 cm. 
 - Materials processing  vol. 2. .
 - Materials processing  vol. 2. .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0444860959 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor doping.