Micro electronic and mechanical systems / editor Zheng Yun Man.
Publisher: New York : Scitus Academics, [2017]Copyright date: ©2017Description: viii, 280 pages : illustrations ; 24cmContent type:- text
- unmediated
- volume
- 9781681175034
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7875.M5374 3 (Browse shelf(Opens below)) | 1 | Available | 00002195700 |
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| TK7875.M457 3 MEMS : fundamental technology and applications / | TK7875.M46 MEMS mechanical sensors / | TK7875.M537 3 Micro- and nanotechnology for space systems / | TK7875.M5374 3 Micro electronic and mechanical systems / | TK7875.M5376 3 Micro-optomechatronics / | TK7875.N36 3 Nanoscale silicon devices / | TK7875.P35 3 Silicon wet bulk micromachining for MEMS / |
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