MEMS [electronic resource] : introduction and fundamentals / edited by Mohamed Gad-El-Hak

Contributor(s):

Gad-el-Hak, Mohamed, 1945-

Series: Mechanical engineering series (Boca Raton, Fla.)Publication details: Boca Raton : CRC/Taylor & Francis, 2006ISBN:

0849391377

Subject(s):

Microelectromechanical systems
Microelectronics
Nanotechnology

DDC classification:

621.381 22

Online resources:

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CRCnetBASE Click here for the electronic version

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Includes bibliographical references and index

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MEMS [electronic resource] : introduction and fundamentals / edited by Mohamed Gad-El-Hak

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