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Semiconductor industry : wafer fab exhaust management / J. Michael Sherer
Publication details: Boca Raton : CRC/Taylor & Francis, 2005Description: 194 p. ; 25 cmISBN:- 1574447203 (alk. paper)
- Wafer fab exhaust management
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7871.85.S46 3 (Browse shelf(Opens below)) | 1 | Available | 00001464055 |
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| TK7871.85.S447 3 Semiconductor devices / | TK7871.85.S448 3 Semiconductor devices and circuits / | TK7871.85.S45 Semiconductor devices: pioneering papers / | TK7871.85.S46 3 Semiconductor industry : wafer fab exhaust management / | TK7871.85.S466 3 Semiconductor nanowires : from next-generation electronics to sustainable energy / | TK7871.85.S53 Microwave semiconductor devices / | TK7871.85.S54 Silicon wafer bonding technology for VLSI and MEMS applications / |
Includes bibliographical refrences and index
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