MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01279nam a2200337 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250918000901.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
081202s2007 enka b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780470018934 (hbk.) |
| Terms of availability |
RM692.00 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0470018933 (hbk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780470727300 (pbk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0470727306 (pbk.) |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
200901050858 |
| Level of effort used to assign nonsubject heading access points |
bedah |
| Level of effort used to assign subject headings |
200812020931 |
| Level of effort used to assign classification |
rasyilla |
| y |
12-02-2008 |
| z |
rasyilla |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UKM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874.M25 3 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) |
.M25 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Mack, Chris A. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Fundamental principles of optical lithography : |
| Remainder of title |
the science of microfabrication / |
| Statement of responsibility, etc. |
Chris Mack |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Chichester, England : |
| Name of publisher, distributor, etc. |
John Wiley & Sons, |
| Date of publication, distribution, etc. |
2007 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvii, 515 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microlithography |
| General subdivision |
Industrial applications |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0804/2007044548-t.html">http://www.loc.gov/catdir/enhancements/fy0804/2007044548-t.html</a> |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b14311641 |
| b |
2020-10-15 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TK7874.M25 3 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls003389794 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
za |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
Institut Kejuruteraan Mikro dan Nanoelektronik - Pasca |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN LINGKUNGAN KEDUA |
| Operator's initials, OID (RLIN) |
2008-02-12 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b14311641 |
