MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01272cam a22003134a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250930120426.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
050315s2004 xxua b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3540204814 (acid-free paper) |
| Terms of availability |
RM690.03 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
200507221508 |
| Level of effort used to assign nonsubject heading access points |
hamudah |
| Level of effort used to assign subject headings |
200507221049 |
| Level of effort used to assign classification |
hamka |
| Level of effort used to assign subject headings |
200507041552 |
| Level of effort used to assign classification |
ariff |
| Level of effort used to assign subject headings |
200503151640 |
| Level of effort used to assign classification |
idah |
| y |
03-15-2005 |
| z |
idah |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85.P73 3 |
| 090 00 - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Predictive simulation of semiconductor processing : |
| Remainder of title |
status and challenges / |
| Statement of responsibility, etc. |
J. Dabrowski, E.R. Weber (eds.). |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Berlin : |
| Name of publisher, distributor, etc. |
Springer-Verlag, |
| Date of publication, distribution, etc. |
2004. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvii, 490 p. : |
| Other physical details |
ill. (some col.) ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Springer series in materials science, |
| International Standard Serial Number |
0933-033X ; |
| Volume/sequential designation |
72 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Simulation methods. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| General subdivision |
Technological innovations. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Dabrowski, Jarek. |
| 9 (RLIN) |
55073 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Weber, Eicke R. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Springer series in materials science ; |
| Volume/sequential designation |
v. 72. |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b13494144 |
| b |
2021-05-28 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TK7871.85.P73 3 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls003301693 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
maa |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
Institut Kejuruteraan Mikro & Nanolektronik |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN LINGKUNGAN KEDUA |
| Operator's initials, OID (RLIN) |
2005-02-03 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b13494144 |
