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Mikrofon kapasitif mems berasaskan silikon karbida (SiC) untuk aplikasi julat frekuensi ultrasonik /

Siti Aisyah Zawawi,

Mikrofon kapasitif mems berasaskan silikon karbida (SiC) untuk aplikasi julat frekuensi ultrasonik / Siti Aisyah Zawawi. - xviii, 215 pages : illustrations ; 30 cm.+ \e 1 computer optical discs (4 3/4 in.)

In process - PL2

Tesis (Ph.D) - Universiti Kebangsaan Malaysia, 2021.

Rujukan : mukasurat 180-196.

ISBN: Hadiah

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations.

Subjects--Topical Terms:
Dissertations, Academic--Malaysia.
Silicon carbide.

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Mikrofon kapasitif mems berasaskan silikon karbida (SiC) untuk aplikasi julat frekuensi ultrasonik /

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