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Piezoresistive microcantilever biosensor fabrication process development /

Badariah Bais,

Piezoresistive microcantilever biosensor fabrication process development / Badariah Bais, Burhanuddin Yeop Majlis, Rosminazuin Ab. Rahim. - 242 pages : illustrations ; 23 cm.

Includes bibliographical references (pages [225]-236) and index.

Microsensors in biosensing -- Microcantilever biosensor -- Technology and theory -- Design and simulation -- Fabrication process development -- Performance and functionality -- Way forward.

ISBN: 9789672517795

Subjects--Topical Terms:
Biosensors.
Biosensor industry.
Microfabrication.

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