Nano-lithography /
Nano-lithography /
edited by Stefan Landis.
- Hoboken, NJ : Wiley, 2011.
- xxv, 325 p. : ill. ; 24 cm.
Includes bibliographical references and index.
Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography.
9781848212114 (hbk.) RM375.28 1848212119
Microlithography.
Nanotechnology.
Includes bibliographical references and index.
Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography.
9781848212114 (hbk.) RM375.28 1848212119
Microlithography.
Nanotechnology.