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Low-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing /

Badariah Bais

Low-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing / Badariah binti Bais - Bangi : Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, 2007 - xxxiii , 306 p. : ill. ; 30 cm.

Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2007

References : p. [231]-240

ISBN: Hadiah

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations

Subjects--Topical Terms:
Dissertations, Academic--Malaysia
Microelectromechanical systems
Accelerometers

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Low-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing /

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