Predictive simulation of semiconductor processing : status and challenges /
Predictive simulation of semiconductor processing : status and challenges /
J. Dabrowski, E.R. Weber (eds.).
- Berlin : Springer-Verlag, 2004.
- xvii, 490 p. : ill. (some col.) ; 24 cm.
- Springer series in materials science, 72 0933-033X ; .
- Springer series in materials science ; v. 72. .
Includes bibliographical references and index.
3540204814 (acid-free paper) RM690.03
Semiconductors--Simulation methods.
Microelectronics--Technological innovations.
Includes bibliographical references and index.
3540204814 (acid-free paper) RM690.03
Semiconductors--Simulation methods.
Microelectronics--Technological innovations.