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Fabrication of silicon microprobes for optical near-field applications /

Minh, Phan Ngoc

Fabrication of silicon microprobes for optical near-field applications / Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi - Boca Raton, Fla. : CRC Press, 2002 - 180 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 0849311543 (alk. paper) RM434.86

Subjects--Topical Terms:
Micromachining
Silicon
Near-field microscopy
Microprobe analysis

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Fabrication of silicon microprobes for optical near-field applications /

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