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Plasma processing of materials : scientific opportunities and technological challenges /

Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, National Research .Council - Washington, D. C. : National Academy Press, 1991. - 75 pages ; 28 cm.

ISBN: 0309045975

Subjects--Topical Terms:
Plasma engineering.
Materials.

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Plasma processing of materials : scientific opportunities and technological challenges /

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