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Ion implantation in semiconductors silicon and germanium /

Mayer, J. W. 1930-

Ion implantation in semiconductors silicon and germanium / by James W. Mayer, Lennart Eriksson and John A. Davies. - New York : Academic Press, 1970. - xiii, 280 p. : ill. ; 24 cm.

Includes bibliographical references.

ISBN: 0124808506

Subjects--Topical Terms:
Ion implantation
Semiconductors

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Ion implantation in semiconductors silicon and germanium /

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